7

A 3-Dimensional Temperature Uniformity Model for a Rapid Thermal Processing Furnace

Année:
1994
Langue:
english
Fichier:
PDF, 366 KB
english, 1994
9

Effective recombination levels in n- and p-type silicon irradiated by 4·5 MeV electrons

Année:
1973
Langue:
english
Fichier:
PDF, 1.68 MB
english, 1973
12

Hubbard's sub-band conduction in Si poly-SiO2 transition layers

Année:
1987
Langue:
english
Fichier:
PDF, 515 KB
english, 1987
20

Investigation of the thermal behavior of a RTP furnace

Année:
1995
Langue:
english
Fichier:
PDF, 463 KB
english, 1995